Sensitive new way of detecting transistor defects
Researchers at the National Institute of Standards and Technology (NIST) and collaborators have devised and tested a new, highly sensitive method of detecting and counting defects in transistors — a matter of urgent concern to the semiconductor industry as it develops new materials for next-generation devices. These defects limit transistor and circuit performance and can affect product reliability.
A typical transistor is, for most uses, basically a switch. When it’s on, current flows from one side of a semiconductor to the other; switching it off stops the current. Those actions respectively create the binary 1s and 0s of digital information.
Transistor performance critically depends on how reliably a designated amount of current will flow. Defects in the transistor material, such as unwanted “impurity” regions or broken chemical bonds, interrupt and destabilize the flow. These defects can manifest themselves immediately or over a period of time while the device is operating.
Over many years, scientists have found numerous ways to classify and minimize those effects.
But defects become harder to identify as transistor dimensions become almost unimaginably small and switching speeds very high. For some promising semiconductor materials in development — such as silicon carbide (SiC) instead of silicon (Si) alone for novel high-energy, high-temperature devices — there has been no simple and straightforward way to characterize defects in detail.
“The method we developed works with both traditional Si and SiC, allowing us for the first time to identify not only the type of defect but the number of them in a given space with a simple DC measurement,” said NIST’s James Ashton, who conducted the research with colleagues at NIST and Pennsylvania State University. They published their results on October 6 in the Journal of Applied Physics. The research focuses on interactions between the two kinds of electrical charge carriers in a transistor: negatively charged electrons and positively charged “holes,” which are spaces where an electron is missing from the local atomic structure. More
